| 摘要 |
PROBLEM TO BE SOLVED: To provide structure for a mass sensor element easy to examine a DNA accurately, and easy to attach and detach a piezoelectric single crystal substrate. SOLUTION: A holding part for holding the mass sensor element to a holder is formed in this mass sensor of the present invention using the piezoelectric single crystal substrate, so as to solve the problem to be solved, the structure is provided to attach/detachably the mass sensor element to the holder, a protrusion projected from an outline part of the mass sensor element is engaged with a recess of the holder, and the mass sensor is integrated with the holder in the protrusion projected from the outline part of the mass sensor element, by a conductive portion for bringing the recess of the holder into electric continuity, so as to solve the problem. COPYRIGHT: (C)2005,JPO&NCIPI
|
