| 摘要 |
PROBLEM TO BE SOLVED: To provide a center of rotation setting method simple in setting a rotation axis within the surface of specimen; a compensation method capable of surely compensating unevenness even the unevenness is existing in the rotation surface; and an X-ray apparatus by realizing them. SOLUTION: The method for setting a center of rotation in the surface of specimen for the X-ray apparatus provided with 6 specimen stages which are rotatable on theϕaxis is that a reference point R is set in the surface of the specimen; many pairs of symmetrical points are measured while rotating in the surface on theϕaxis; center points C of each symmetrical points are calculated; if these central points coincide, the coincident point is set as a rotation center in the surface of the specimen; on the other hand if these points don't coincide, the center of gravity of the many center points is calculated; the calculated center of gravity is set as the rotation center of the surface of the specimen, and at the same time the deviation from the center of gravity are registered as a data base; and the unevenness of the specimen stages are compensated by using the registered deviations between the center of gravity and central points. COPYRIGHT: (C)2005,JPO&NCIPI
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