| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-spherical shape measuring method and a non-spherical shape measuring arrangement capable of suppressing measurement error caused by imperfectness of synthetic processing of orbicular data and accurately measuring non-spherical shape. SOLUTION: At first, a transmissive diffraction element 105 is inserted in the light path of a test wave L2 and a non-spherical wave is irradiated on a tested surface 108a. Then, for the whole surface of the tested surface 108a, interference fringe of reflection test wave L3 and a reference wave L4 is collectively measured. Next, the transmissive diffraction element 105 is moved outside the light path, and measuring the interference fringe is repeated by varying the distance between a pin hole PH and the tested surface 108a to obtain the orbicular data (partial profile) for all surface of the tested surface 108a. Then, a shape data of the whole effective surface of the tested surface 108a is constructed by synthesizing the high frequency component of the partial profile and the low frequency component of overall profile. COPYRIGHT: (C)2005,JPO&NCIPI
|
