发明名称 PROTECTION TUBE FOR THERMOCOUPLE, AND TEMPERATURE MEASURING INSTRUMENT USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a protection tube for a thermocouple capable of maintaining air-tight sealability for a connection part even when carrying out 1100°C or more of high-temperature heat treatment in a horizontal furnace using a heat-treating tube, and a temperature measuring instrument using the same. SOLUTION: In this protection tube for the thermocouple provided at least with an insertion part inserted into the heat-treating tube equipped to the horizontal furnace, and the connection part for air-tight connection to the heat-treating tube via a sealant, at least the connection part comprises quartz, and the insertion part comprises a material having heat resistance higher than that of quartz, and the temperature measuring instrument using the protection tube is also provided. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005106512(A) 申请公布日期 2005.04.21
申请号 JP20030337486 申请日期 2003.09.29
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 KIMURA AKIHIRO;KOBAYASHI HIROYUKI
分类号 G01K1/08;H01L21/22;(IPC1-7):G01K1/08 主分类号 G01K1/08
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