| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to prevent the thermal interference of crucibles and to efficiently deposit a plurality of layers of films on the surfaces of solids while preventing the deposition material of another crucibles from adhering to the surfaces of the solids and from contaminating the surfaces. SOLUTION: The molecular beam source cell for depositing the thin films is equipped with two or more molecular beam source units 1 which have rotary crucible holders 12 for holding a plurality of the crucibles 14 in the state of arranging the crucibles in the circumferential form around a certain center, rotating mechanisms 13 for rotating the rotary crucible holders 12 around the center and heater units 20 for heating the crucibles 14 in a position where one of the crucibles 14 is stopped by the rotating mechanisms 13. The crucibles 14 heated by the heater units 20 of the respective molecular beam source units 1 are partitioned from each other by heat shielding walls 3 to be cooled and the heater units 20 for heating the crucibles 14 are fixed to the heat shielding walls 3. COPYRIGHT: (C)2005,JPO&NCIPI
|
