| 摘要 |
PROBLEM TO BE SOLVED: To improve the operating rate of a molecular beam epitaxial growth system by shortening the evacuation time in a reservoir section after material packing, shortening the outgassing time of the packing material, and preventing the contamination in a growth chamber at the time of the outgassing. SOLUTION: The molecular beam cell is mounted on the molecular beam epitaxial growth system, irradiates the material with a molecular beam and has the reservoir section in which the material is packed, and a molecular beam irradiation section to which the molecular beam is supplied from the reservoir section through an introducing pipe. The reservoir section has an inner tank in which the material is packed and an outer tank which is equipped with a heater for heating the inner tank. The inner tank has an exhaust unit. COPYRIGHT: (C)2005,JPO&NCIPI
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