发明名称 |
Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same |
摘要 |
The invention is directed to simultaneously etching thin films to different uniform depths depending on positions by using a photoresist pattern having different thickness depending on positions as an etch mask in order to form a contact hole for a gate pad along with at least one other layer, or a data wire and a semiconductor pattern, via a single photolithography step. |
申请公布号 |
US2005082536(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040933521 |
申请日期 |
2004.09.03 |
申请人 |
PARK WOON-YONG;YOON JONG-SOO |
发明人 |
PARK WOON-YONG;YOON JONG-SOO |
分类号 |
H01L21/336;G02F1/136;G02F1/1368;H01L21/027;H01L21/3213;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/15 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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