发明名称 Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same
摘要 The invention is directed to simultaneously etching thin films to different uniform depths depending on positions by using a photoresist pattern having different thickness depending on positions as an etch mask in order to form a contact hole for a gate pad along with at least one other layer, or a data wire and a semiconductor pattern, via a single photolithography step.
申请公布号 US2005082536(A1) 申请公布日期 2005.04.21
申请号 US20040933521 申请日期 2004.09.03
申请人 PARK WOON-YONG;YOON JONG-SOO 发明人 PARK WOON-YONG;YOON JONG-SOO
分类号 H01L21/336;G02F1/136;G02F1/1368;H01L21/027;H01L21/3213;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/15 主分类号 H01L21/336
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