TEACHING TOOL FOR SEMICONDUCTOR WAFER CARRYING ROBOT

摘要

A teaching tool (11) enabling an increase in accuracy for estimating the position of a wafer, the accurate positioning thereof even in a device of such type that supports the wafer by a pin, and the self-collection thereof by the robot. The teaching tool (11) teaches the position of the wafer to the robot by putting the wafer on a wafer loading part and detecting a detected part by a light transmission type sensor installed on the hand (5) of the robot. The teaching tool comprises a large disk part (12) having the same outer diameter as that of the wafer, a small circular pin (22) positioned co-axial with the large disk part (12), and an arch-shaped member (26) positioned co-axial with the large disk part (12). The teaching tool is formed such that a distance between the center of the large disk part (12) and the outer circular part of the arch-shaped member (26) is equal to a distance between the optical axis (10) of the sensor and the center (29) of the wafer loading part of the hand (5).