| 摘要 |
PROBLEM TO BE SOLVED: To reduce polarization-dependent loss in a high polymer optical waveguide device. SOLUTION: The device has an SiO2 layer 12 as an intermediate layer on the upper face of a silicon substrate 11, and has a Y-branched high polymer optical waveguide 13 on this SiO2 layer 12. Inside the SiO2 layer 12, there is generated a stress 111A reverse to the direction of a stress 102A in the high polymer optical waveguide 13. The stress 102A inside the high polymer optical waveguide 13 is canceled by the stress 111A inside the SiO2 layer 12, with a residual stress inside the high polymer optical waveguide 13 desirably becoming zero. COPYRIGHT: (C)2005,JPO&NCIPI |
