| 摘要 |
PROBLEM TO BE SOLVED: To equalize the surface temperature of a substrate in a substrate-heating device, to which a tubular member is connected. SOLUTION: The substrate-heating device is provided with a sheet type ceramics substrate having a heating surface mounting a substrate on the upper surface thereof with a resistance heat-generating body embedded therein, and the tubular member connected to the center of lower surface of the ceramics substrate and provided therein with the tubular member, equipped with a power supplying rod being connected to the resistant heat generating terminal. The heating surface thereof is worked so as to have the configuration of protruded surface, in which the central part is highest, and the height becomes smaller as the circumferential part thereof is approached. According to this configuration of heating surface, a substantial heat transmitting efficiency in the center part is increased, whereby the effect of deterioration of temperature at the central part of heating surface due to the effect of heat transmission to the tubular member is compensated, and the equalization of surface temperature of the substrate can be contrived. COPYRIGHT: (C)2005,JPO&NCIPI
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