| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for dripping a liquid member which can adequately drip a predetermined amount of a liquid member in a predetermined area and improve the product quality while preventing reduction of through-put in a dripping process. SOLUTION: The speed of relative movement between a stage 41 mounting a substrate 1 and a container 42 housing the liquid member L is changed by a controller 44. Then, when a discharge opening of the relatively moving container 42 approaches the vicinity of seal agents 2 setting the dripping area, the scattered liquid member L can be prevented from getting over the area of the seal agents 2 and flying out by reducing the speed of the relative movement. COPYRIGHT: (C)2005,JPO&NCIPI
|
