发明名称 |
Six-axis force sensor chip and six-axis force sensor using the same |
摘要 |
A thin plate-shaped six-axis force sensor chip comprising a semiconductor substrate formed by semiconductor film-forming processes, the sensor chip having through-holes formed therein and arranged so that the sensor chip is functionally divided by the through-holes into an action part to which an external force is applied, a support part to be fixed to an external structure, and a plurality of connecting parts each connecting together the action part and the support part and having a bridge portion of generally T-shaped configuration joined to the action part and an elastic portion joined to the support part. Each of the connecting parts has a plurality of strain resistance devices each comprising an active layer formed on at least one of front and rear faces thereof in an area thereof where deformation strain effectively occurs, the strain resistance devices being electrically connected to corresponding electrodes disposed in the support part.
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申请公布号 |
US2005081645(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040972354 |
申请日期 |
2004.10.26 |
申请人 |
HONDA GIKEN KOGYO KABUSHIKI KAISHA |
发明人 |
OHSATO TAKESHI;HIRABAYASHI YUSUKE |
分类号 |
G01L5/16;(IPC1-7):G01D7/00 |
主分类号 |
G01L5/16 |
代理机构 |
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代理人 |
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地址 |
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