| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To increase the moving velocity of an incident position of a laser beam on the surface of a substrate. <P>SOLUTION: A galvano-scanner 5 performs the scanning with the laser beam emitted from a light source 1. A first optical system 6 propagates the scanning laser beam by the galvano-scanner 5 so that it perpendicularly penetrates through a first virtual plane VP<SB>1</SB>. With the scanning with the laser beam by the galvano-scanner 5, the passing position of the laser beam in the first virtual plane VP<SB>1</SB>moves. A second optical system 7 propagates the laser beam transmitted through the first virtual plane VP<SB>1</SB>so that it approximately perpendicularly penetrates through a second virtual plane VP<SB>2</SB>. When the passing position of the laser beam moves by a distance X in the first virtual plane VP<SB>1</SB>, the passing position of the laser beam in the second virtual plane VP<SB>2</SB>moves by a distance Y larger than the distance X. The substrate W is held approximately parallel to the second virtual plane VP<SB>2</SB>. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
