| 摘要 |
PROBLEM TO BE SOLVED: To provide a multiple division light receiving element capable of improving high-frequency characteristics. SOLUTION: In the multiple division light receiving element, a plurality of light receiving elements 1 are adjacently formed. The light receiving element 1 detects light by the pn junction between a buried layer 12 and a substrate 11, and the pn junction between an epitaxial layer 13 and a diffusion layer 12. The diffusion layer 12 is divided into a plurality of regions 12a, 12b, 12c, and 12d in an inplane direction for forming the pn junction in respective regions 12a, 12b, 12c, and 12d in the vertical direction. The buried layer 12 is divided into a plurality of regions for forming, thus regulating diffusion in a pair of electron/positive holes generated in the epitaxial layer 13 and the buried layer 12, for example shortening distance to the end of a depletion layer formed by the pn junction between the buried layer 12 and the substrate 11, and hence following a quick response and improving high frequency characteristics. COPYRIGHT: (C)2005,JPO&NCIPI
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