发明名称 [DYNAMIC MASK MODULE]
摘要 A dynamic mask module is disclosed, which comprises a micro-computer system, a mask pattern generator and a light source. The mask pattern generator is disposed over a substrate and electrically connected to the microcomputer system. The microcomputer system transmits an image signal to the mask pattern generator. The light source is disposed over the mask pattern generator to a photo-resist layer on the substrate. The mask pattern generated by the dynamic mask module is a dynamic image and the mask pattern can be changed on anytime. In addition, the manufacturing cost can be and the manufacturing time can be reduced.
申请公布号 US2005083498(A1) 申请公布日期 2005.04.21
申请号 US20030707628 申请日期 2003.12.25
申请人 JENG JENG-YWAN;WANG JIA-CHANG;SHEN CHANG-HO 发明人 JENG JENG-YWAN;WANG JIA-CHANG;SHEN CHANG-HO
分类号 G03F1/08;G03F1/68;G03F7/00;G03F7/20;H01L21/027;(IPC1-7):G03B27/42 主分类号 G03F1/08
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