发明名称 SERVOMOTOR CONTROL SYSTEM AND METHOD IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
摘要 A method and system for controlling a servomotor network. The system has at least one local control node remotely located from a central processing area. The local control node actuates one or more servomotors, and is physically placed near the controlled servomotors. A network connects each local control node to a controller card. The controller card is generally placed in an expansion slot of an appropriately-configured computer, and is responsible for polling, monitoring, and controlling the various local control nodes, as well as interfacing a central processing unit (CPU) and the nodes. The controller card receives instructions from the CPU by way of a local bus, determines the local control node responsible for the servomotor to which the instruction relates, formats the instructions for transmission across the network, and relays the instructions to the node. Servomotor control is thus centralized.
申请公布号 WO2004008494(A3) 申请公布日期 2005.04.21
申请号 WO2003US21647 申请日期 2003.07.10
申请人 AVIZA TECHNOLOGY, INC.;MA, JOHN 发明人 MA, JOHN
分类号 H01L21/22;C23C16/44;C23C16/455;C23C16/46;C23C16/54;F27B5/14;F27B5/18;F27D11/02;H01L21/00;H01L21/02;H01L21/205;H01L21/324;H01L21/677;H05B3/00;H05B3/06;H05B3/66 主分类号 H01L21/22
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