| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem wherein fine conditioning of the leading end of a probe cannot be performed by overload in a contact region. <P>SOLUTION: This scanning type probe microscope for scanning the probe and a sample relatively is equipped with the probe, an exciting means for exciting the probe, a feedback circuit for controlling the distance between the probe and the sample due to the effect of physical quantity received from the sample of the vibrated probe and a reference value changeover means for changing over a reference value prescribing the distance between the probe and the sample in the feedback circuit, to at least two different values. Also, the scanning type probe microscope is equipped with a cantilever, having an elastomer for supporting the probe, an exciting means for exciting the cantilever and an exciting signal changeover means, for changing over at least two exciting signals inputted to the exciting means. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
