| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform atmospheric pressure glow discharge without presence of the flow instability of an eddy current or the like in discharge space in a method for forming atmospheric pressure glow discharge plasma (APG). <P>SOLUTION: In the method for forming the atmospheric pressure glow discharge plasma (APG), plasma is formed in the discharge space (7) between the surfaces of a first electrode (1) and a second electrode (2). The plasma is formed by supplying a gaseous substance to the discharge space, and also electric power to the surfaces of the first electrode and the second electrode. When the gaseous substance is supplied, a middle gas supply stream (5) is formed, and further a main gas supply stream (6) is formed. The main gas supply stream changes the flow direction of the middle gas supply stream into a direction along the surfaces of the first electrode and the second electrode. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
