SURFACE TREATMENT APPARATUS AND METHOD FOR PRODUCING LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can evenly treat a substrate surface with a rotating body having a plurality of wire materials.

SOLUTION: The surface treatment apparatus as a washing device comprises brushes 10A and 10B, a brush drive mechanism 50 that causes the rotating brushes 10A and 10B to approach a substrate 30, and potential measurement devices 41A1to 41A3that measure the potentials generating at respective conductor patterns 31A1to 31A3on the substrate 30 by the contact and separation between the front ends of scrub materials of the running brushes 10A and 10B .

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