| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively realize a pressure adjustment with superior controllability, in a vacuum pump and a vacuum device having this vacuum pump, used for a semiconductor manufacturing device and a liquid crystal display panel manufacturing device. SOLUTION: This vacuum pump P has a compression ratio adjusting mechanism part Pγfor varying a probability M of a gas molecule to which momentum is applied in the transfer direction among gas molecules sucked in to a turbo-molecular pump mechanism part Pt from an intake port 4. The vacuum pump adjusts pressure in a vacuum chamber C by outputting and controlling a turning angle command signal corresponding to a correction value to a driving motor 39 for driving the compression ratio adjusting mechanism part Pγfrom a PID compensator 53, by detecting a difference between a measured measurement pressure value and a preset target pressure value as the correction value by a correction value detector 52, by measuring the pressure in the vacuum chamber C installed in the the intake port 4 of the vacuum pump P by a pressure gauge 103, in a control system 51 connected to the vacuum pump P. COPYRIGHT: (C)2005,JPO&NCIPI |
