发明名称 |
Defect inspection method and apparatus therefor |
摘要 |
A defect inspection apparatus for inspecting a fine circuit pattern with high resolution to detect a defective portion is constructed to have an objective lens for detecting an image of a sample, a laser illumination unit for illuminating the sample through the objective lens, a unit for reducing the coherence of the laser illumination, an accumulation type detector, and a unit for processing the detected image signal.
|
申请公布号 |
US2005083519(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040971109 |
申请日期 |
2004.10.25 |
申请人 |
MAEDA SHUNJI;YOSHIDA ATSUSHI;SHIBATA YUKIHIRO;YOSHIDA MINORU;UTO SACHIO;SHISHIDO HIROAKI;NAKATA TOSHIHIKO |
发明人 |
MAEDA SHUNJI;YOSHIDA ATSUSHI;SHIBATA YUKIHIRO;YOSHIDA MINORU;UTO SACHIO;SHISHIDO HIROAKI;NAKATA TOSHIHIKO |
分类号 |
G01B11/30;G01N21/956;G02B21/06;G06T1/00;(IPC1-7):G11B7/00 |
主分类号 |
G01B11/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|