| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost supporting unit for a positioning stage capable of easily realizing high accuracy and high plane accuracy as a positioning stage in a simple structure and with a small number of components, and easily enduring a high load. SOLUTION: A supporting unit comprises a retainer 8 having a plurality of ball accommodating holes 8a provided circumferentially in a spaced relationship and penetrating vertically, balls 7 that are respectively accommodated in each ball accommodating hole 8a of the retainer 8, a lower plate 6 and an upper plate 11 that are arranged at the upper and lower sides of the retainer 8 to contact a plurality of balls 7 from the upper and lower sides, respectively, a top plate 12 that is provided integrally with the upper plate 11 to receive a loaded object, and a spring 10 for restoring the top plate 12 to a center position at no-load. COPYRIGHT: (C)2005,JPO&NCIPI |
