| 发明名称 |
METHOD FOR MANUFACTURING DISPLAY DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a display device which can form a uniform film quality without requesting a high heat resistance for a substrate. SOLUTION: The method for manufacturing the display device having a thin film on the substrate includes a step of relatively moving a position to be sprayed on the substrate while spraying raw material gas used to form the thin film and high temperature gas for thermally decomposing the raw material gas on the substrate, and a step of forming the thin film on the substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005109081(A) |
申请公布日期 |
2005.04.21 |
| 申请号 |
JP20030339236 |
申请日期 |
2003.09.30 |
| 申请人 |
HITACHI DISPLAYS LTD |
发明人 |
NAKANO YASUSHI;TANAKA MASAHIRO;NARIMATSU MASATOSHI |
| 分类号 |
G02F1/1362;G09F9/00;G09F9/30;H01L21/20;H01L21/205;H01L21/316;H01L21/318;H01L21/336;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):H01L21/205;G02F1/136 |
主分类号 |
G02F1/1362 |
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