| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus and a cleaning method for preventing the interference between an object to be cleaned and a guide pin and between an ultrasonic head and a cleaning nozzle. SOLUTION: The cleaning apparatus is provided with a discrimination means for discriminating whether the ultrasonic head is in contact with the to-be-cleaned object; a first drive mechanism for setting a first position to be apart more from the object to be washed than a second position and moving the first position, the first position being an inspection position at which a jet nozzle, the ultrasonic head, and the to-be-cleaned object placed on a spin table are inspected, when they are driven in mutually parting directions, and the second position being a washing position; and a second drive mechanism for moving the relative position between the jet nozzle and the to-be-cleaned object in directions in crossing with the parting directions. Further, a projected amount of the guide pin from the surface of the to-be-washed object is selected smaller when the number of revolutions of the spin table is lower than the projected amount, when the number of revolutions of the spin table is higher. COPYRIGHT: (C)2005,JPO&NCIPI |
