| 摘要 |
PROBLEM TO BE SOLVED: To produce a diffractive optical element having high shape accuracy by effectively correcting the shape of a molding die. SOLUTION: In the step 3 to 6, an error of the base face shape of the die is obtained by measuring the three-dimensional shape of the die for molding a diffraction optical element, obtaining the base face shape from which a diffraction lattice shape is removed and comparing it with a design value. On the basis of the error of the base face shape thus obtained, mold machining condition is changed and a return to the step 2 is made for remachining the die. The steps 3 to 6 are repeated. If the error of the base face shape of the die is within a tolerance of specification, the diffraction optical element is molded by using the die, and in the steps 9 to 11, the same steps as described above are executed to extract an error of the base face shape of a molded product. If necessary, the machining shape of the die is corrected in the step 15, and a return to the step 2 and the die is reprocessed. COPYRIGHT: (C)2005,JPO&NCIPI |
