摘要 |
PROBLEM TO BE SOLVED: To repair disconnection reliably, while suppressing an increase of wiring resistance. SOLUTION: Disconnected ends 124d1 and 124d2 of a power line 124, which are on the same board and have the same potential, are connected with each other and also with power lines 124n1 and 124n2 neighboring the disconnected power line l24 by using one and the same repair wiring 128. The repair wiring pattern 128 is drawn and formed, for instance, by scanning, with a laser beam, a region planned for the repair wiring pattern 128 in a gas atmosphere of a conductive material such as tungsten. Wiring resistance is reduced and flatness is improved on the pattern of the repair wiring pattern 128 because not only the disconnected parts but also neighboring power lines are connected. COPYRIGHT: (C)2005,JPO&NCIPI
|