| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for cleaning a tape-shaped member, wherein no damages are applied to the surface of the tape-shaped member, and foreign matter can be removed by its sticking capability. SOLUTION: In the method and device for cleaning the tape-shaped member, the tape-shaped member is formed with fine circuits at a predetermined space in a longitudinal direction on a surface thereof and is consecutively shifted to the longitudinal direction and a constant direction, to clean the tape-shaped member on this shifting path. A cleaning fluid is atomized by the force of an air pressure and is sprayed to the tape-shaped member, whereby cleaning is performed by colliding fine particles of the cleaning fluid with the tape-shaped member. COPYRIGHT: (C)2005,JPO&NCIPI
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