| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor element which can be increased in electric capacity. SOLUTION: The capacitor element comprises a substrate, and a bottom electrode layer 12, a dielectric layer 13, and a top electrode layer formed, in this order on the substrate. The dielectric layer 13 is deposited, by spraying a dielectric fine particle material and a conductive fine particle material, both in the form of aerosol. For the dielectric fine particle material, TiO<SB>2</SB>, MgO, SiO<SB>2</SB>, AlN, Al<SB>2</SB>O<SB>3</SB>, or oxide ceramic having a perovskite structure is used. For the conductive fine particle material, a metal element such as B, Ge, Si, Bi, Ti, Cr, Pt, Pd, In, Ru, Ni, Mo, Co, W, Ir, Al, Au, Cu, and Au, an alloy, a conductive oxide, or the like is used. In the dielectric layer 13, air gaps may be formed in a fine particle deposited portion, and the air gaps are filled with resin. COPYRIGHT: (C)2005,JPO&NCIPI
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