| 摘要 |
PROBLEM TO BE SOLVED: To control the center position of a pulse disk of a rotary encoder, to minimize the imbalance, to perform adjustment of the imbalance easily, to reduce the deflection at the time of rotation, and to highly precisely detect the rotating position according to the resolution. SOLUTION: The static pressure gas bearing spindle includes a static pressure gas bearing 3 which supports a main shaft 1, a motor 10 for driving the shaft 1 for rotation, and the rotary encoder 19 for detecting the rotating position. The pulse disk 16 of the rotary encoder 19 is arranged near one end of the main shaft 1 and mounted on an attachment surface S perpendicular to the center of the main shaft 1. The pulse disk 16 is secured to the attachment surface S by means of a detachable fastener 17 such as a bolt inserted through a fastener insertion portion 7 formed in the pulse disk 16. An end face of a mount 12 fixed to one end of the main shaft 1 is used as the attachment surface S. The mount 12 is secured to the main shaft 1 by a plurality of setscrews 13 in the radial direction. COPYRIGHT: (C)2005,JPO&NCIPI
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