发明名称 VALVE ASSEMBLY HAVING IMPROVED CONDUCTANCE CONTROL
摘要 A valve assembly including a housing having a flow channel and an annular surface surrounding the flow channel, a slide plate movable to a closed position, and a seal ring positioned between the annular surface and the slide plate. The seal ring includes a first and second sides, a first surface extending between the first and the second sides and facing towards the annular surface of the housing, and a second surface axially spaced from the first surface and extending between the first and the second sides and facing towards the slide plate. The second surface includes a continuous annular sealing portion for contacting the slide plate when the seal ring is biased against the slide plate so that a fluid-tight seal can be formed between the continuous annular sealing portion and the slide plate, and at least one passageway positioned between the annular sealing portion and the second side.
申请公布号 WO2005036034(A2) 申请公布日期 2005.04.21
申请号 WO2004US25888 申请日期 2004.08.10
申请人 MKS INSTRUMENTS, INC.;LUCAS, PAUL, D.;CARBONE, ANTHONY, J. 发明人 LUCAS, PAUL, D.;CARBONE, ANTHONY, J.
分类号 F16K3/06 主分类号 F16K3/06
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