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发明名称
Stiff flat mirror on a silicon substrate for wide angle scanning
摘要
申请公布号
AU2004280860(A1)
申请公布日期
2005.04.21
申请号
AU20040280860
申请日期
2004.05.07
申请人
ROSEMOUNT AEROSPACE INC.
发明人
JOSEPH T. PESIK
分类号
G02B5/08;G02B7/182;G02B26/08;G02B26/10;(IPC1-7):G02B5/08
主分类号
G02B5/08
代理机构
代理人
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地址
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