发明名称 Fluid injection nozzle
摘要 A fluid injection nozzle for treating a substrate includes a first plate having a first tip, and a second plate having a second tip, the second tip being coupled to the first plate by a fastener. The first and second plates define a fluid channel, and the first and second tips have lengths different from each other.
申请公布号 US2005082397(A1) 申请公布日期 2005.04.21
申请号 US20040864997 申请日期 2004.06.10
申请人 HEO KYOUNG-HEON 发明人 HEO KYOUNG-HEON
分类号 B08B3/02;B05B1/00;B05B1/04;B05B1/14;B05B1/30;B05B1/34;B05C5/00;B05C5/02;F02G5/00;(IPC1-7):B05B1/30 主分类号 B08B3/02
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