METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method by which a high-quality semiconductor device can be manufactured at a high yield by reducing the variation of the electric characteristics of the device. SOLUTION: The method of manufacturing the semiconductor device is composed of a main body wafer manufacturing process of manufacturing a wafer forming a semiconductor device which becomes a product, and a monitor wafer manufacturing process of manufacturing a wafer forming a monitor element and only shares a monitoring step. The main body wafer manufacturing process includes a variation reducing step and the monitor wafer manufacturing process includes a workmanship observing step and a conditions setting step. COPYRIGHT: (C)2005,JPO&NCIPI