发明名称 PROJECTING OPTICAL SYSTEM, ALIGNER, AND EXPOSURE METHOD
摘要 PROBLEM TO BE SOLVED: To effectively correct chromatic aberration by a suitable combination between a quartz lens and a fluorite lens while suppressing the inherent double refraction of a fluorite and the compaction of a quartz. SOLUTION: A projecting optical system provided with a plurality of lenses (L11 to L410) and capable of forming an image of the first face (R) on a second face (W) includes a positive lens (L1) arranged on the most first face side, a first negative lens (L12) arranged adjacently to the second face side of the positive lens (L11), a second negative lens (L13) arranged adjacently to the second face side of the first negative lens (L12), and a third negative lens (L14) arranged adjacently to the second face side of the second negative lens (L13). Each of two lenses (L12, L13) out of four lenses (L11 to L14) has one optical surface formed like an aspherical shape. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005109286(A) 申请公布日期 2005.04.21
申请号 JP20030342718 申请日期 2003.10.01
申请人 NIKON CORP 发明人 IKEZAWA HIRONORI;OMURA YASUHIRO
分类号 G02B13/18;G02B13/22;G02B13/24;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G02B13/18
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