| 摘要 |
PROBLEM TO BE SOLVED: To obtain a desired contact load without waiting for the attenuation of vibration of a probe vibrating at a mechanical resonance frequency. SOLUTION: A processor 119 lowers a probe toward a surface to be measured without waiting for attenuation of vibration of a probe vibrating at mechanical resonance frequency, decelerates the lowering of the probe on the basis of the output of a comparator 108 for comparing a signal converted from frequency included in the output signal of a D/A converter 106 corresponding to the displacement of the probe, to a voltage, with a specific voltage 109. The processor also initiates fine control of contact pressure of the probe based on the output of a comparator 110 for comparing the signal converted from the frequency to the voltage with a specific voltage 111, terminates the lowering of the probe based on a comparator 117 comparing a signal having extracted a direct current component included in the output signal of the D/A converter 106 and a specific voltage 118 and initiates the measurement. COPYRIGHT: (C)2005,JPO&NCIPI
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