发明名称 |
Laser beam machine |
摘要 |
A laser beam machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a light detection means for detecting light of a processing portion of the workpiece to which a laser beam is applied from the laser beam application means and a control means for judging whether the output value of the light detection means falls within a predetermined permissible range.
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申请公布号 |
US2005082264(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040961219 |
申请日期 |
2004.10.12 |
申请人 |
NAGAI YUSUKE;KOBAYASHI SATOSHI;MORISHIGE YUKIO;NAKAMURA MASARU;MURATA MASAHIRO |
发明人 |
NAGAI YUSUKE;KOBAYASHI SATOSHI;MORISHIGE YUKIO;NAKAMURA MASARU;MURATA MASAHIRO |
分类号 |
B23K26/00;B23K26/03;B23K101/40;H01L21/301;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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