| 摘要 |
An X-ray analysis apparatus in which X-rays emitted from an X-ray source are applied to a sample and a two-dimensional CCD sensor detects the X-rays diffracted by the sample. The X-ray analysis apparatus includes a scan-moving means for scan-moving the two-dimensional CCD sensor in a plane, and a charge-transfer signal generating means for generating a charge-transfer signal in the CCD sensor, every time the CCD sensor is moved for a distance corresponding to the width of a pixel constituting the CCD sensor. Hence, the motion of the semiconductor X-ray detecting means and the generation of the charge-transfer signal are synchronized with each other to achieve time delay integration operation. Since the timing of transfer of electric charges in the CCD sensor is synchronized with scan-motion velocity of the CCD sensor, each pixel can accurately analyze the intensity of the X-ray diffracted at each diffraction angle.
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