| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a reactor, by which a crooked part of a flow passage having high precision can be formed. <P>SOLUTION: A mask 81 is formed on one side 52 of a first substrate 51 and linear openings 82, 82,... are formed on the mask 81 by exposing/developing the mask 81. Linear grooves 53, 53,... are formed respectively in the openings 82, 82,... by etching or sandblasting the mask 81-applied first substrate 51. A catalyst 54 is formed on the wall surface of the groove 53. Linear grooves 63, 63,... are formed also on one side 62 of a second substrate 61. The mask 81-formed side 52 of the first substrate is stuck to the groove 63-formed side 62 of the second substrate 61. The side 52 is joined to the side 62 so that a part of the groove 53 is superimposed on a part of the groove 63, and the groove 53 and the groove 63 are made to cross each other at right angles. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
