发明名称 TRANSISTOR COMPRISING SALIENT DRAIN AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide the structure of a transistor and its manufacturing method, where a drain is raised from a substrate surface. <P>SOLUTION: A salient part is formed on a drain that maintains a high voltage, and the ion of high concentration is implanted on the salient part, forming a high-concentration drain region. The salient part is formed of a region which is doped in low concentration as with a low concentration drain region. Thus, a transistor that occupies less area is manufactured, and a process margin for forming the high-concentration drain is assured in a manufacturing process. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005109479(A) 申请公布日期 2005.04.21
申请号 JP20040278481 申请日期 2004.09.24
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 LEE SOO-CHEOL;JANG DONG-RYUL;LEE TAE-JUNG
分类号 H01L29/78;H01L21/336;H01L29/08;H01L29/94 主分类号 H01L29/78
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