| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method which enables an easy and precise calibration of a thermal desorption spectroscopy apparatus. SOLUTION: The TDS (thermal desorption spectroscopy) apparatus is calibrated by adjusting the spectral position (correspondent relationship between the spectral position and the mass/charge ratio) of the MS (mass spectrometry), using a standard sample 10 composed of a high polymer sheet 2 including a calibration component 1. In contrast to a conventional calibration method for the TDS apparatus using a standard gas, because the calibration operation does not require the use of a calibration instrument such as a capillary or another apparatus such as a mass flow controller other than the TDS apparatus, the calibration operation is facilitated, and the error in the calibration due to existence of a foreign substance attached to the capillary or the deterioration in the vacuum degree in the TDS apparatus does not arise. Accordingly, the calibration precision is improved. COPYRIGHT: (C)2005,JPO&NCIPI
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