发明名称 Die bonding apparatus and method for bonding semiconductor chip using the same
摘要 A die bonding apparatus may include a bond head providing a heating function. The bond head may include a die collet for picking up a semiconductor chip when performing a die bonding process. The die collet may heat the semiconductor chip by using heat transmitted from the bond head when picking up the chip. The die collet may also provide a heating function for heating the chip.
申请公布号 US2005081986(A1) 申请公布日期 2005.04.21
申请号 US20040885768 申请日期 2004.07.08
申请人 KWON HEUNG-KYU;KIM SE-NYUN;YOON KI-MYUNG 发明人 KWON HEUNG-KYU;KIM SE-NYUN;YOON KI-MYUNG
分类号 H01L21/52;H01L21/00;H01L21/58;H01L21/68;(IPC1-7):C09J1/00;B32B31/00 主分类号 H01L21/52
代理机构 代理人
主权项
地址