发明名称 |
Heater for crystal formation, apparatus for forming crystal and method for forming crystal |
摘要 |
The present invention provides a heater for manufacturing a crystal by the Czochralski method comprising at least terminal portions supplied with current and a heat generating portion by resistance heating, and being arranged so as to surround a crucible containing a raw material melt, wherein the heater has a uniform heat generation distribution to the raw material melt after deformation while in use during crystal manufacture. It is thus possible to prevent hindrance of monocrystallization and unstable crystal quality caused by ununiform temperature in the raw material melt due to deformation of the shape of the heater's heat generating portion while in use during crystal manufacture.
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申请公布号 |
US2005081779(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040503721 |
申请日期 |
2004.08.06 |
申请人 |
SONOKAWA SUSUMU;HOSHI RYOJI;SATO WATARU;OHTA TOMOHIKO |
发明人 |
SONOKAWA SUSUMU;HOSHI RYOJI;SATO WATARU;OHTA TOMOHIKO |
分类号 |
C30B15/14;C30B29/06;C30B35/00;(IPC1-7):C30B15/00;C30B21/06;C30B28/10;C30B27/02;C30B30/04;C30B13/00;C30B21/04;C30B28/08 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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