AMORPHOUS BORON NITRIDE THIN FILM AND METHOD FOR PRODUCING SAME, MULTILAYER FILM, TRANSPARENT PLASTIC FILM, AND ORGANIC EL DEVICE

摘要

A method for producing an amorphous boron nitride thin film is characterized in that a thin film having a composition represented by the general formula (1) below is formed by supplying a reactive gas between opposing electrodes, applying a high-frequency voltage thereto for exciting the reactive gas, and exposing a base to the excited reactive gas at or near atmospheric pressure. General formula (1) BNxCy:H (In the formula, x and y satisfy: 0.7 <= x <= 1.3, 0 <= y <= 1.5.)