| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an aluminum nitride (AlN) sintered powder by which the manufacture is carried out at a low cost, the granulation is carried out in a non-explosion-proof type spray dryer by preparing slurry with water base without using an organic solvent and the firing is carried out even under an oxygen-containing atmpsphere, and an aluminum nitride (AlN) sintered powder. <P>SOLUTION: The method of manufacturing the aluminum nitride sintered powder having an average particle diameter of 10-200 μm includes: drying slurry aqueous solution prepared by containing a phosphate compound with a spray dryer, a sintering assistant and aluminum nitride powder in the spray dryer and firing it at 1,400-2,100°C. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
