| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillation gyroscopic element low in CI value by eliminating the affection of spurious oscillation; and a piezoelectric oscillation gyroscopic sensor high in angular velocity detection sensitivity and precision. <P>SOLUTION: The horizontal type piezoelectric oscillation gyroscopic element comprises the detecting vibration arms 28a, 28b bending vibrating in an XY plane extending from the center base 27 to both sides; a pair of connection arms 29a, 29b extending from the center base orthogonally to both the sides; the bases 30a, 30b connected with the tips of the connection arms; and two pairs of driving vibration arms 31a, 31b and 32a, 32b extending parallel to the vibration arms for detecting the bending vibration in the XY plane. In an opening 33, the gyroscopic element is provided with the fixing support part 34 integrally connected by multiple flexible bridges 35 in the XY plane. The gyroscopic element is fixedly supported in the package 21 of the sensor by directly bonding on the IC chip 23 for driving/controlling with the fixing supporting part. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
