| 发明名称 |
Dehydration drying method and apparatus, and substrate processing apparatus |
| 摘要 |
A dehydration drying method dehydrates and dries a substrate. The substrate ( 15 ) is dehydrated and dried without being rotated while the substrate ( 15 ) is accommodated in a carrier ( 10 ) operable to carry the substrate ( 15 ) between apparatuses for carrying out certain processes.
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| 申请公布号 |
US2005081890(A1) |
申请公布日期 |
2005.04.21 |
| 申请号 |
US20040503054 |
申请日期 |
2004.07.30 |
| 申请人 |
ATO KOJI;TOGAWA TETSUJI |
发明人 |
ATO KOJI;TOGAWA TETSUJI |
| 分类号 |
B65D85/86;F26B5/04;F26B5/08;F26B25/06;H01L21/00;H01L21/304;H01L21/306;H01L21/3105;H01L21/316;(IPC1-7):B08B5/04 |
主分类号 |
B65D85/86 |
| 代理机构 |
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代理人 |
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