SEMICONDUCTOR-ON-INSULATOR ARTICLE AND METHOD OF MAKING SAME
摘要
A semiconductor structure includes a substrate. A first semiconductor layer is formed on the substrate and being converted into a porous layer. The porous layer is further oxidized to form a buried oxide layer.
申请公布号
WO2004073043(A3)
申请公布日期
2005.04.21
申请号
WO2004US04253
申请日期
2004.02.13
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;CHENG, ZHIYUAN;FITZGERALD, EUGENE, A.
