Bolometer, infra-red detection apparatus using it and means of manufacture

摘要

The zones of sensitive material not in contact with the electrodes (5) have undulation orientated in a direction perpendicular to the plane containing the sensitive component of the bolometric detector. The sensitive bolometric material is amorphous silicon or a compound of the type Si xGe yC z where x + y + z = 1 : An independent claim is included for the method of making the bolometric detector.