发明名称 |
PLATING DEVICE |
摘要 |
<p>A plating apparatus according to the present invention has a plating tank (40) for holding a plating solution (10), an anode (56) disposed so as to be immersed in the plating solution (10) in the plating tank (40), a regulation plate (60) disposed between the anode (56) and a plating workpiece (W) disposed so as to face the anode (56), and a plating power supply (24) for supply a current between the anode (56) and the plating workpiece (W) to carry out plating. The regulation plate (60) is disposed so as to separate the plating solution (10) held in the plating tank (40) into a plating solution on the anode side and a plating solution on the plating workpiece side, and a through-hole group (68) having a large number of through-holes (66) is formed in the regulation plate (60). <IMAGE></p> |
申请公布号 |
EP1524338(A1) |
申请公布日期 |
2005.04.20 |
申请号 |
EP20030765327 |
申请日期 |
2003.07.18 |
申请人 |
EBARA CORPORATION |
发明人 |
YAJIMA, TOSHIKAZU;TAKEMURA, TAKASHI;KIUMI, REI;SAITO, NOBUTOSHI;KURIYAMA, FUMIO;KIMURA, MASAAKI |
分类号 |
C25D7/12;C25D17/00;C25D21/12;(IPC1-7):C25D21/12 |
主分类号 |
C25D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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