| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting samples which enable an inspection taking advantages of both inspections by integrating the inspections of comparing measurement image data and design image data with each other and of comparing measurement image data with each other. SOLUTION: The apparatus for inspecting samples is provided with a measurement image data generating part for generating measurement image data, a design image data generating part for generating design image data, and a means for comparing measurement image data and design image data with each other, or measurement image data with each other. The apparatus loads a memory for storing design image data and measurement image data, and has a means for comparing measurement image data and design image data with each other for a first region when there are n identical regions in the design data, and comparing measurement image data with design image data generated when the first region is inspected for an m (m is not larger than n) region or with measurement image data of a k region (k is smaller than m).</p> |
